METHOD FOR MANUFACTURING FRONT-SIDE TRANSPARENT COATINGS BASED ON AN ARRAY OF UNGROWN INDIVIDUAL ZINC OXIDE NANORODS Russian patent published in 2021 - IPC H01L21/00 B82B3/00 

FIELD: instrument engineering.

SUBSTANCE: invention relates to optoelectronic devices, in particular to nanotechnologies for obtaining active coatings, which can be used to develop new devices, such as sun-blind near-ultraviolet photodetectors (NUP), sensors, piezoelectric generators, etc. The objective of the invention is to create a method for producing free-standing zinc oxide nanorods available for visible and near-ultraviolet radiation from the front side and with high uniformity in size, while reducing material consumption during manufacture. The problem is solved by using pulsed electrochemical deposition (PED) simultaneously with the use of a template in the form of a track membrane for growing nanorods fixed on a transparent substrate with a transparent electrically conductive coating. In this case, a semiconductor nanostructured ZnO layer of n-type conductivity is formed in the form of zinc oxide nanorods grown in the pores of the track membrane and separated from each other by it.

EFFECT: method makes it possible to grow free-standing zinc oxide nanorods.

1 cl, 1 dwg