DEVICE FOR SELECTION BY REPEATED HEATING FOR GAS-PHASE PROCESS Russian patent published in 2020 - IPC C23C16/54 

Abstract RU 2724260 C1

FIELD: oil, gas and coke-chemical industries.

SUBSTANCE: invention relates to device for selection of solid phase substances from exhaust gas containing unreacted ingredient of gas-phase process by repeated heating. Proposed device comprises reservoir made up of chamber elongated in axial direction, inlet channel and outlet channel communicated with chamber and separated in axial direction from each other, heater and partition wall. Heater is made with possibility of chamber heating between inlet channel and outlet channel. Separation wall comprises at least one partition for placing solid-phase substances obtained by decomposing unreacted gaseous ingredient, and made with possibility of movement in axial direction inside the chamber with arrangement of at least one of partitions between the inlet channel and the outlet channel.

EFFECT: prevention of deposits of chlorosilane polymers in the outlet system and maintenance of the device in working condition continuously for a long period of time.

5 cl, 12 dwg

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RU 2 724 260 C1

Authors

Ootsuka Yuuta

Tanaka Yasutomo

Kubota Wataru

Ishizaki Masato

Dates

2020-06-22Published

2017-10-02Filed