FIELD: radio engineering and communications.
SUBSTANCE: invention relates to radio frequency power transmission devices. Device is made with possibility of resonance (2), is suitable for RF power transmission, in particular, used for plasma generation, and is configured to electrically connect downstream of the radio frequency power supply (3) operating at constant or variable frequency, comprises at least one inductive element (Lp), which can be powered, when used, from such at least one power supply (3); at least one capacitive element (Cp), electrically connected to outputs of such at least one inductive element (Lp); wherein such at least one device (2) has a resonant circular frequency equal to: ω0 = 1/√LpCp. Capacitive element (Cp) and inductive element (Lp) have such values that in resonance state they provide equivalent impedance, measured at outputs of such device (2), substantially resistive type and much larger than parasitic impedance value upstream relative to such outputs of such device (2), therefore, when used, the effect of such parasitic impedance is substantially insignificant.
EFFECT: technical result is high efficiency of transmitting radio-frequency power.
35 cl, 9 dwg
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Authors
Dates
2020-10-29—Published
2016-01-15—Filed