SENSOR SYSTEM Russian patent published in 2020 - IPC H01L27/146 G01N21/64 G01N33/50 

FIELD: physics.

SUBSTANCE: invention can be used in biosensor systems. Sensor recognition system includes an image sensor structure and a flow cell. Image sensor structure includes an image layer located above the base substrate. Device packet is located above the image layer. Contact site is located in device package. Passivating bag is located above the device package and the contact platform. Matrix of nano-sized holes is located in upper layer of passivating bag. Silicon interconnection (SIC) is in electrical contact with contact pad. SIC passes through the base substrate. Redistribution layer (RDL) is located on lower surface of base substrate. RDL is in electrical contact with SIC. Flow cell is located above the upper layer of the passivating bag with formation of a flow channel between them. Flow channel is located above the matrix of nano-sized holes and the contact platform.

EFFECT: invention provides the need to increase throughput on data generated by the results of the implementation of the reaction protocols, as well as in reduction of size of nano-sized holes in matrices of nano-sized holes in structure of image sensor and increase in number of nano-sized holes in matrices of nano-sized holes, and also takes into account the increasing need for reduction of size and increase in the number of nanosized holes, as well as the possibility that chemical characteristics of the surface required for preparation for chemical reactions and their carrying out are compatible with electronic components in the sensor system.

20 cl, 14 dwg