DEVICE FOR OPTICAL CLEANING OF SOLID SURFACE FROM NANOPARTICLES Russian patent published in 2021 - IPC H01L21/268 

FIELD: technological processes.

SUBSTANCE: invention relates to devices for cleaning solid surfaces from nano- and microparticles and can be used for removal of nanoparticles from surface of semiconductor plates after grinding, as well as in space optics, high-resolution optics, photonics, other nanotechnologies. Device for optical cleaning of solid surface from nanoparticles contains source of laser radiation irradiating meso-sized dielectric particle with a characteristic size (diameter) of not less than the wavelength of the used radiation and an effective refractive index of the material of about 2, in the mesodimensional particle has a hole with diameter less than half the wavelength of the used radiation, novel is that the mesodimensional particle has the shape of a cylinder or a rectangular parallelepiped, irradiation is carried out on the side surface of the particle, and the opening is made directly on the shadow surface of the mesodimensional particle along its side surface.

EFFECT: invention enables to provide optical cleaning of a solid surface of nanoparticles with high efficiency of operation owing to a larger surface of simultaneous removal of micro- and nanoparticles from a solid surface by a contactless method.

1 cl, 2 dwg