FIELD: chemistry.
SUBSTANCE: invention relates to radiation detectors and concerns a thin film suitable for bolometric applications. Thin film contains a vanadium target doped with one of the oxides of transition metals, where said thin film is represented by V(MO)Ox, and the transition metal oxide (MO) is WO3, Nb2O5, TiO2, HfO.
EFFECT: technical result consists in improvement of film uniformity and improvement of its operational properties.
11 cl, 1 dwg
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