FIELD: measuring equipment.
SUBSTANCE: invention relates to measuring equipment and is intended for non-destructive control of quality and homogeneity of magnetic films by recording ferromagnetic resonance spectra from small areas of the samples under study. A scanning ferromagnetic resonance spectrometer contains a sensing element - a microwave head, a table. There is a test sample of a thin magnetic film and Helmholtz coils on the table. The scanning ferromagnetic resonance spectrometer has a digital modulation signal generation unit, a digital scan signal generation unit, a table positioning system, while the signal is detected by digital quadrature synchronous detector. Common Helmholtz coils are used to form the modulating magnetic field and the scanning magnetic field, and the table positioning is fully automated.
EFFECT: improved measurement accuracy, reduced level of intrinsic noise, increased speed and reduced labor intensity of measurements.
1 cl, 2 dwg
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