METHOD OF PRODUCING LAYER OF TRANSPARENT CONDUCTING OXIDE ON GLASS SUBSTRATE Russian patent published in 2014 - IPC H01L31/18 

FIELD: chemistry.

SUBSTANCE: method of producing a layer of transparent conducting oxide on a glass substrate involves deposition of a zinc oxide ZnO layer on the glass substrate by chemical gas-phase deposition at low pressure and subsequent texturing of the surface of the ZnO layer by high-frequency magnetron etching in the medium of a working gas while simultaneously moving electromagnets of the magnetron on the surface of the ZnO layer at certain periods of time and magnetron power.

EFFECT: method is highly efficient and reduces the cost of producing layers of transparent conducting oxides by reducing time and power consumption on growing said layers and surface modification.

3 cl, 4 dwg