FIELD: magnets.
SUBSTANCE: area of application: for selection of electromagnetic emission. The substance of the invention consists in the fact that the manufacture of a microstructural element intended for selection of electromagnetic emission, made of a metal perforated self-supporting mesh structure, includes lithographic processes in forming a resistive mask setting the topology of the microstructural element, and securing the manufactured mesh structure in a supporting frame, wherein the mesh structure is made from a preform made of industrially produced foil by perforation thereof by means of plasma-chemical etching using a metal protective mask produced using a resistive mask, the metal whereof is characterised by an etching rate in the corresponding chemically active plasma applied for etching the metal of the foil, small in comparison with the metal of the foil.
EFFECT: simplified manufacture of self-supporting metal mesh structures for selection of electromagnetic emission.
7 cl, 6 dwg
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