X-RAY TEMPLATE AND METHOD FOR ITS MANUFACTURING Russian patent published in 2013 - IPC H01L21/33 

FIELD: electrical engineering.

SUBSTANCE: in the X-ray template representing an X-ray absorbing structure formed on polymer film attached to the support ring the support ring is made of two or more rings forming a stretching frame whereon polymer film is fixed, the X-ray absorbing structure designed as complex and integral, one of its elements being a resistive mask. The X-ray template manufacture method includes formation of a resistive mask and an X-ray absorbing structure on polymer film, used as the bearing membrane, by lithographic methods as well as fixation of the bearing membrane on the support ring; fixation is performed prior to formation of the X-ray absorbing structure including the resistive mask as a component.

EFFECT: minimisation of geometrical distortions of the template X-ray absorbing structure and reduction of the template manufacture prime cost.

11 cl, 4 dwg