METHOD FOR IMPROVING CHARACTERISTICS OF INTEGRATED OPTICAL CIRCUIT (OPTIONS) Russian patent published in 2022 - IPC F04D17/16 

FIELD: electrical engineering.

SUBSTANCE: invention relates to the field of manufacturing integrated optical circuits (IOC) based on ferroelectric or pyroelectric crystals (for example, lithium niobate, lithium tantalate, etc.). A method is proposed for improving characteristics of an integrated optical circuit including substrate or a chip made of optical material prone to chemical reduction in a hydrogen-containing medium. The method includes stages, at which a masking layer is applied to the surface of working areas of substrate or chip; substrate or chip is heated to a temperature from 80°C to 600°C; non-working parts of substrate or chip surface are processed in the hydrogen-containing medium. The masking layer essentially eliminates the contact of the surface of working areas of substrate or chip with the hydrogen-containing medium.

EFFECT: when implementing the proposed invention, an increase in operational properties of an integrated optical circuit is achieved.

12 cl, 4 dwg