METHOD FOR LASER PROCESSING OF NON-METALLIC MATERIALS Russian patent published in 2022 - IPC H01L21/268 H01L21/428 B23K26/00 

Abstract RU 2773255 C2

FIELD: metal working.

SUBSTANCE: invention relates to the field of technological processes and can be used for laser annealing or doping of semiconductor, ceramic, and glass-like materials. Method for laser processing of non-metallic materials according to the invention consists in preheating the material to an initial temperature determined from the condition of thermal stability connecting the strength, thermophysical properties of the material, the duration of laser pulse and the annealing temperature, and exposing the material to a laser pulse with an energy density sufficient for the surface of the material to reach the annealing (melting) point.

EFFECT: prevented spallation fracture of materials during processing and increased yield ratio.

1 cl, 1 dwg

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RU 2 773 255 C2

Authors

Kovalenko Aleksandr Fedorovich

Dates

2022-06-01Published

2020-11-05Filed