METHOD OF LASER PROCESSING OF NON-METALLIC MATERIALS Russian patent published in 2019 - IPC H01L21/268 

Abstract RU 2695440 C1

FIELD: physics.

SUBSTANCE: invention relates to technological processes and can be used for laser annealing or alloying of semiconductor, ceramic and vitreous materials. Method of laser treatment of non-metallic materials according to the invention consists in preliminary heating of material to initial temperature, determined from the condition of thermal strength, connecting strength, thermophysical properties of material, duration of laser pulse and annealing temperature, and exposure to material of laser pulse with energy density sufficient for material surface to reach annealing temperature (melting).

EFFECT: method is used to prevent spall destruction of materials during processing and increase of yield.

1 cl, 1 dwg

Similar patents RU2695440C1

Title Year Author Number
METHOD FOR LASER PROCESSING OF NON-METALLIC MATERIALS 2020
  • Kovalenko Aleksandr Fedorovich
RU2773255C2
METHOD OF LASER PROCESSING OF NONMETALLIC PLATES 2017
  • Kovalenko Aleksandr Fedorovich
RU2649238C1
METHOD FOR LASER ANNEALING OF NON-METALLIC PLATES 2016
  • Kovalenko Aleksandr Fedorovich
RU2630197C1
METHOD FOR LASER PROCESSING OF NON-METALLIC PLATES 2021
  • Kovalenko Aleksandr Fedorovich
RU2760764C1
METHOD OF LASER PROCESSING OF NON-METALLIC PLATES 2018
  • Kovalenko Aleksandr Fedorovich
RU2685427C1
METHOD OF LASER PROCESSING OF NONMETALLIC PLATES 2017
  • Kovalenko Aleksandr Fedorovich
RU2649054C1
METHOD OF LASER PROCESSING NON-METALLIC PLATES 2016
  • Kovalenko Aleksandr Fedorovich
RU2624998C1
METHOD OF LASER PROCESSING OF NONMETALLIC MATERIALS 2017
  • Kovalenko Aleksandr Fedorovich
RU2646177C1
METHOD OF LASER PROCESSING OF NONMETALLIC PLATES 2015
  • Kovalenko Aleksandr Fedorovich
  • Fedorishchev Oleg Nikolaevich
RU2602402C1
METHOD FOR LASER ANNEALING OF NON-METALLIC PLATES 2021
  • Kovalenko Aleksandr Fedorovich
RU2757537C1

RU 2 695 440 C1

Authors

Kovalenko Aleksandr Fedorovich

Dates

2019-07-23Published

2018-12-06Filed