DEVICE FOR VACUUM APPLICATION OF COATING AND METHOD OF COATING APPLICATION ON SUBSTRATE Russian patent published in 2021 - IPC C23C14/24 C23C14/56 

Abstract RU 2741042 C1

FIELD: technological processes.

SUBSTANCE: group of inventions relates to a device for continuous vacuum deposition on a moving substrate of coatings formed from metal or metal alloy, method of applying said coatings and assembly for assembling said device. Said device comprises a vacuum chamber and means for moving the substrate through a vacuum chamber along a predetermined path. Vacuum chamber comprises central body with inlet and outlet holes for substrate, located on two opposite sides of central body, and device for application of coating with steam jet. Inner walls of central body are adapted for heating at temperature higher than condensation temperature of metal or metal alloy vapors. Steam separator in the form of an external housing is placed at the output hole for the central housing substrate. Inner walls of steam separator are adapted to be maintained at temperature below condensation temperature of metal or metal alloy vapors.

EFFECT: prevention of condensation of vapors of metal or metal alloys outside the deposition chamber, reduced danger of clogging of the hole of the central housing due to metal deposition on cold walls of the steam separator.

11 cl, 2 dwg

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RU 2 741 042 C1

Authors

Silberberg, Eric

Schmitz, Bruno

Pace, Sergio

Bonnemann, Remy

Marneffe, Didier

Dates

2021-01-22Published

2018-12-11Filed