DEVICE FOR VACUUM COATING AND METHOD OF SUBSTRATE COATING Russian patent published in 2021 - IPC C23C14/24 C23C14/56 

FIELD: technological processes.

SUBSTANCE: invention relates to a device for continuous vacuum coating. Coatings are made of a metal or a metal alloy. Coatings are applied onto a moving substrate. The device has a vacuum chamber through which the substrate is able to move along a predetermined trajectory of movement, while the vacuum chamber includes a central body having an inlet and an outlet for the substrate located on two opposite sides of the central body, and a device for coating with a steam jet, when the inner walls of the central body are adapted to be heated at a temperature higher than the condensation temperature of metal or metal alloy vapors, the steam separator is in the form of an external body located at the outlet for the substrate of the central body, while the inner walls of the steam separator are adapted to be maintained at a temperature below the condensation temperature of metal or metal vapors alloy, while the channel connecting the central body with the steam separator is provided with at least one thermal connector that extends at least from the inner walls of the central body to the inner walls of the steam trap.

EFFECT: invention is aimed at preventing condensation of metal vapors in the holes of the deposition chamber.

17 cl, 3 dwg