CONTACT HEAD FOR FOUR-PROBE MEASUREMENTS Russian patent published in 2022 - IPC G01R1/73 H01L21/66 

Abstract RU 2778212 C1

FIELD: measuring equipment.

SUBSTANCE: invention relates to measuring equipment, in particular to equipment for ensuring the contact of measuring equipment with the test sample when measuring surface and specific resistivity by the four-probe method. The contact head for carrying out four-probe measurements includes two ceramic plates connected by means of four brass racks, which from the outside provide connection of measuring equipment. Four racks are mounted on the outer plate, to which rigid wires are connected, acting as springs that provide the necessary clamping force in the working position for the contacting needles and the electrical contact between the needles and the discharge wires for measuring equipment. The probe needles are located on the same line and pass through both ceramic plates through the holes in such a way that the axis of the needles is perpendicular to the surface of the plates and the distance between the ends of adjacent needles is the same.

EFFECT: increase in the speed and accuracy of measurements.

1 cl, 1 dwg

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RU 2 778 212 C1

Authors

Nasonov Andrei Iurevich

Khusnullin Anton Shamilevich

Cherniadev Andrei Iurevich

Shukhtin Kondratii Petrovich

Dates

2022-08-15Published

2021-12-22Filed