METHOD FOR CREATING A SENSOR FOR HYDROGEN DETECTION Russian patent published in 2022 - IPC G01N27/407 

FIELD: electrical measuring technology.

SUBSTANCE: invention relates to electrical measuring technology, in particular to sensors for measuring the composition of the environment at high temperatures and can be used to detect hydrogen leaks and prevent the creation of an explosive air-hydrogen mixture when used in hydrogen energy. A method for creating a sensor for detecting hydrogen includes placing a 4H-SiC sample in a vacuum chamber, creating a vacuum, followed by deposition of a Ni film by pulsed laser deposition, followed by annealing the sample in vacuum and cooling the sample to room temperature, turning the sample with the other side and re-creating the vacuum, the inlet of the working gas to a pressure of 25 Pa and heating of the product, followed by the deposition of the main W₁₈O₄₉ film by pulsed laser deposition, then a vacuum is created and a catalytic film is applied over the W₁₈O₄₉ film, after which the sample is cooled and removed, while after creating a vacuum to a residual pressure of 10^-5 PA apply a layer of Ni up to 100 nm thick for up to 10 minutes, then the sample is annealed at temperatures of 500-1000°C for at least 30 min, followed by cooling the sample to room temperature and turning the sample on the other side, after rotating the sample and re-creating the vacuum, the sample surface is heated to a temperature of 350-800°C and then an additional layer of ВC₃ with a thickness of 50-100 nm is applied at a pressure of 10^-5 Pa by the method of pulsed laser deposition by laser ablation of a composite target consisting of boron and carbon in a ratio of 1:3, then oxygen is injected to a pressure of 25 Pa and the main W₁₈O₄₉ film is deposited with a thickness of up to 500 nm for up to 60 min, after which a vacuum is created and a Pd catalytic layer is applied at a pressure of 10^-5 Pa with a thickness of up to 50 nm for up to 1.0 min.

EFFECT: invention makes it possible to create a sensor with increased sensitivity to hydrogen at temperatures above 300°C and extended service life by increasing the thickness of the film sensitive to hydrogen and improving its adhesive properties.

1 cl, 3 dwg