PROCEDURE FOR PRODUCTION OF THIN FILMS ON BASE OF EuS Russian patent published in 2011 - IPC C23C14/06 C23C14/24 B82B3/00 

Abstract RU 2428505 C2

FIELD: metallurgy.

SUBSTANCE: procedure consists in forming thin film layer of EuSx on substrate by sedimentation EuS and sulphur from different targets in vacuum and in successive vacuum annealing of formed film at temperature facilitating sulphur desorption. Also, sedimentation of sulphur is performed before or in the process of EuS sedimentation.

EFFECT: increased quality of film, reduced expenditures for its production.

3 cl, 3 dwg

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RU 2 428 505 C2

Authors

Zenkevich Andrej Vladimirovich

Lebedinskij Jurij Jur'Evich

Parfenov Oleg Evgen'Evich

Teterin Petr Evgen'Evich

Dates

2011-09-10Published

2009-10-12Filed