METHOD OF PRODUCTION OF ANTIFRICTIONAL THIN FILMS Russian patent published in 2009 - IPC C23C14/28 

FIELD: metallurgy.

SUBSTANCE: invention relates to a technique of application of protective antifrictional coatings, namely to a method of production of antifrictional thin films and can be used in the vacuum, aeronautical and space engineering, micromechanics, manufacturing of metal-cutting and metal-working tools. Laser sputtering of a target is performed with the target made of dichalconids of refractory metals with the density of the laser emission being from 5 to 100 J/cm², with the room temperature of the padding and the inert gas pressure being 1-10 Pa. The dichalconids of refractory metals are selected from the group including MoS₂, WS₂, MoSe₂ WSe₂, MoSe₂/Ni, WSe₂/Ni. The padding is positioned opposite the target at a distance of 3-8 cm. The padding can be made of any metal materials and hard alloys used in the machine-building industry. The padding can be made of steel with a coating of diamond-like carbon (α-C).

EFFECT: simplified technique and reduced pollution of the environment and occupational hazard.

6 cl, 5 dwg, 3 ex, 2 tbl