MAGNETRON WITH COOLING SYSTEM Russian patent published in 2024 - IPC H01J25/50 H01J37/34 C23C14/35 

FIELD: liquid atomisation or spraying devices.

SUBSTANCE: invention relates to the design of a magnetron sputtering system, namely to the design of cooling systems. Magnetron with a cooling system comprises a housing cover bolted to a peripheral housing, in which there is a target, a central magnet and a fin installed under it for mixing cooling water, placed on a retainer of the central magnet and the fin, peripheral magnet placed under the target on the peripheral magnet fixture. Retainers are located in the lower housing connected to the peripheral housing by bolts, where there is an inlet hole with a cooling water supply tube and an outlet hole with a cooling water discharge tube.

EFFECT: increased efficiency of cooling sensitive elements of magnetron and uniform distribution of heat in target, thereby increasing the efficiency of the sputtering process and improving the heat removal and cooling of the sensitive components of the magnetron, thereby ensuring the continuity of the sputtering process and improving the quality of the coating.

1 cl, 1 dwg