DEVICE FOR ATTACHING SUBSTRATES DURING DEPOSITION OF THIN FILMS (VARIANTS) Russian patent published in 2023 - IPC C23C14/50 B23Q3/15 H01L21/68 

FIELD: vacuum deposition of films.

SUBSTANCE: invention relates to the vacuum deposition of films of various materials onto substrates fixed on a cooled base-substrate holder. The device contains a cooled substrate holder, elements for fixing and pressing the substrate to the substrate holder. The fixation elements are made in the form of bar magnets installed in the holes of the substrate holder at its edges. The clamping elements are made in the form of a clamping frame made of thermally conductive material with pins made of soft magnetic material or a magnet installed on its edges, or in the form of clamping caps made of thermally conductive material with installed pins made of soft magnetic material or a magnet, or in the form of a clamping frame or clamping caps made of soft magnetic material with blind holes, designed to provide a gap between the surfaces of the ends of the bar magnets and the bottom of the blind holes, or in the form of a clamping bar made of soft magnetic material in the form of a corner with horizontal and side shelves.

EFFECT: invention ensures fastening of substrates to a cooled substrate holder with fastening elements without protruding clamping protrusions, minimal time for attaching and removing substrates, and removal of heat generated during the deposition process.

6 cl, 6 dwg