FIELD: surface physics; chemistry.
SUBSTANCE: invention can be used to analyse the physicochemical properties of surface of thin films of nanocomposite oxide materials and create gas sensors with high gas sensitivity on their basis. The method for determining the properties of gas sensitivity of thin films of nanocomposite oxide materials to gases includes scanning film samples with different molar ratios of oxides and then obtaining an image of the surface under study by atomic force microscopy, while directly measuring the surface potential of film samples using Kelvin probe force microscopy, building a graph of the dependence of the values of the surface potential of the films on the molar ratio of oxides, then according to the graph, the material with the highest value of the surface potential, corresponding to the highest value of the gas sensitivity coefficient, is determined.
EFFECT: increase in the speed of determining the gas sensitivity of thin films of nanocomposite oxide materials to gases.
1 cl, 4 dwg
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