GAS-SENSITIVE ELEMENT OF CONDUCTOMETRIC SENSOR FOR DETECTING NITROGEN DIOXIDE AND METHOD FOR PRODUCTION THEREOF Russian patent published in 2024 - IPC G01N27/12 B82Y30/00 B82Y40/00 

FIELD: physics.

SUBSTANCE: group of inventions relates to gas analysis and environmental monitoring. Disclosed is a gas-sensitive element of a conductometric sensor for detecting nitrogen dioxide, the active layer of which consists of submicron oriented fibres of nickel oxide with diameter of 400–800 nm and length ranging from units to several tens of micrometres. Active layer is deposited on the surface of an inert heat-resistant substrate, made, for example, of glass, silicon, ceramics, aluminium oxide Al₂O₃, with inert electrodes located on it, which have an interdigital arrangement and are made of gold, platinum, palladium. Preferably, between the surface of the inert heat-resistant substrate and interdigital inert electrodes there is a metal layer having good adhesion to the substrate material, made of nickel, titanium, chromium or a mixture thereof. Active layer is coated with a layer of nickel oxide nanoparticles. Also disclosed is a method of making said gas-sensitive element.

EFFECT: gas-sensitive element according to the invention extends the range of means of said purpose, has high sensitivity to ultra-low amounts (from 1 ppm) of the detected gas, mechanical resistance, homogeneity, good adhesion of the sensitive layer to the surface of the substrate, is characterized by manufacturability.

8 cl, 7 dwg, 1 tbl