METHOD FOR OBTAINING A NANOSCALE FILM OF GAMMA-AlO(111) Russian patent published in 2023 - IPC C23C14/08 C23C14/16 C23C14/24 B82Y30/00 

FIELD: nanotechnology.

SUBSTANCE: aluminum oxide powder is heated to a temperature of 2700-2800°C under ultrahigh vacuum conditions° and a stream of AlO and (AlO)₂ particles is formed during evaporation, which are deposited on the surface of pure crystallographically oriented crystalline metal substrates Mo (111), W (111) or Ta (111). Each successive deposited monolayer is exposed to molecular oxygen at a pressure of 10^-6 mmHg for 5 min at a substrate temperature of 800-900°C.

EFFECT: obtained nanosized film of gamma-Al₂O₃ (111) is highly stable, while the oxide-metal interphase boundary at the atomic level, as well as the continuity of the film and its atomic structure at a thickness of up to 100 nm are preserved.

1 cl, 3 ex