METHOD OF PRODUCING COATING BASED ON INDIUM AND TIN OXIDE Russian patent published in 2017 - IPC C23C14/08 C23C14/16 C23C14/34 C03C17/09 C03C17/23 C03C17/245 

FIELD: chemistry.

SUBSTANCE: method of producing a coating based on indium and tin oxide on the substrate surface involves spraying the indium and tin oxide onto the substrate to provide the desired refractive index of the coating by selecting the process variable of the sputtering process. According to the invention, the sputtering is carried out under normal orientation of the substrate relative to the flow of the sprayed substance, the process of spraying the indium and tin oxide onto the substrate includes a sequentially performed operation for spraying indium and tin oxide by electron-beam evaporation or magnetron sputtering at a temperature of 400 to 500°C and the operation of spraying indium and tin oxide by magnetron sputtering at a temperature of 15 to 75°C, the required value of the refractive index of the coating is provided by selecting the mass of the substance applied to each of the said spraying operations.

EFFECT: producing an indium and tin oxide coating with a given refractive index value while ensuring its uniformity in thickness.

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