FIELD: testing devices.
SUBSTANCE: multi-cavity product is placed in a vacuum chamber with a leak detector connected to it. Evacuate the vacuum chamber. The first stage of filling the first cavity of the multi-cavity product with a mixture of test gas and air is carried out. At this stage, a reference flow of test gas is supplied to the vacuum chamber. The increment in the partial pressure of the test gas in the vacuum chamber is measured from the reference flow of the test gas supplied to the vacuum chamber. Partial pressure of test gas is measured in the vacuum chamber before the start of the first stage of filling the first cavity of the multi-cavity product. The first cavity of the multi-cavity product is filled with a mixture of test gas and air. Partial pressure of test gas is measured in the vacuum chamber after completion of the first stage of filling the first cavity of the multi-cavity product. The leakage increment of the first cavity of the multi-cavity product is calculated at the first stage of filling based on the measured increments of the partial pressure of the test gas in the vacuum chamber at the first stage of filling and from the reference flow of test gas supplied to the vacuum chamber. Soaking is performed to establish thermal equilibrium of the first cavity of the multi-cavity product with the environment. After the first stage of filling the first cavity of a multi-cavity product with a mixture of test gas and air, the subsequent stages of filling the remaining cavities of the multi-cavity product with a mixture of test gas and air are carried out the required number of times until the specified test pressure is achieved in the cavities of the multi-cavity product, performing the above actions. In this case, when the specified test pressure is reached in the cavities of the multi-cavity product, at the last stage of filling, no time is taken to establish thermal equilibrium of the cavity of the multi-cavity product with the environment. Then the calculated increments of leakage of each cavity of the multi-cavity product are summed up at each stage of its filling. The degree of leakage of each tested cavity of a multi-cavity product is judged by the value of the sum of the calculated increments of leakage of this cavity of a multi-cavity product at each stage of its filling.
EFFECT: reduced test duration.
3 cl, 1 dwg, 1 tbl
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Authors
Dates
2024-01-15—Published
2023-01-09—Filed