MICROFLUIDIC THERMAL FLUID FLOW SENSOR Russian patent published in 2024 - IPC G01F1/684 G01F1/692 

FIELD: microfluidic devices.

SUBSTANCE: thermal microfluidic fluid flow sensor, including a base, on the first side of which the first measuring area, the second measuring area and the third measuring area located between them are located along the axis, while in the first measuring area at least at least one first temperature sensor, in the second measuring area, at least one second temperature sensor is formed, in the third measuring area, at least one heater is formed, wherein at least one reference temperature sensor is also located on the first side of the base, and the first array of contact pads and the second array of contact pads are formed, connected via conductive paths to the first temperature sensor, the second temperature sensor, the reference temperature sensor and the heater, allowing the first temperature sensor, the second temperature sensor, the reference temperature sensor and the heater to be connected individually into an external electrical circuit, the base has the same thickness over the entire area, the second side of the base is the heat exchange surface between the fluid flow and the first temperature sensor, the second temperature sensor, the reference temperature sensor and a heater made of conductive material, and on the second side, a plate with a channel located along the axis and having through holes connected to the channel is hermetically connected to the base of the device.

EFFECT: production of a flow sensor with an integrated microfluidic channel in a single production cycle, ensuring operation with corrosive liquids, reduced complexity of manufacturing the device.

2 cl, 5 dwg