FIELD: engine devices and pumps.
SUBSTANCE: invention relates to a device for protection of a pump interior surfaces using atomic layer deposition (ALD) coating. An intake manifold is provided to the inlet of the protected pump, consisting of one or more supply lines, equipped with their own control components, which are monitored by a computer control system, and a vent line is provided to the outlet of the protected pump by connecting the intake manifold to the inlet of the protected pump and connecting the vent line to the outlet of the protected pump. The interior surfaces of the protected pump are affected by self-limited surface reactions, following each other, with the help of series feed of reaction gasses and purge gas through the intake manifold, whereas the interior surfaces of the protected pump are also affected by the reaction gases and of discharge of the residual reaction products and purge gas through the vent line. The intake manifold is disconnected from the inlet of the protected pump and the vent line is disconnected from the outlet of the protected pump. ALD is carried out when the pump is both in operation and out of operation. Said device provides for implementation of said method and includes the intake manifold, consisting of vapour precursor and purge gas supply lines, equipped with their own control components, and designed to connect to the inlet of the protected pump. The intake manifold is fed with reaction gases and purge gas, the vent line is designed to be connected to the outlet of the pump to be protected. The residual reaction products and purge gas are withdrawn through the vent line, and a control system controls the supply of reaction gases to the internal volume of the pump to be protected and their withdrawal through the vent line.
EFFECT: internal surfaces of the pump are protected by an effective protective coating.
12 cl, 2 dwg
