METHOD OF MAKING SMALL-SIZE ATOMIC CELL WITH ALKALI METAL VAPOURS Russian patent published in 2024 - IPC B81C1/00 

FIELD: microstructure technologies.

SUBSTANCE: invention relates to microsystem engineering and microelectromechanical systems. Method for manufacturing a small-sized atomic cell with vapours of alkali metal atoms includes forming a cavity structure in a silicon plate, comprising at least two cavities connected by channels, connection of the lower plane of the plate to the bottom, arrangement of an alkali metal source in one of the cavities, sealing the cell and also local heating of the alkali metal source. In order to form an internal cavity structure in a silicon plate, a first level coating is successively applied on both planes of the silicon plate, forming a mask first level pattern by liquid or plasma etching, applying a second level coating on the upper plane of the silicon plate with the first level mask, pattern of the second level of the mask is formed by liquid etching, through cavities are made in the silicon plate under the protection of the mask of the second level by the method of vertical ion-plasma etching or mechanical drilling. Then the second level mask is removed by liquid etching and channels are formed on the side of the upper plane of the silicon plate with a decrease in the surface roughness of the walls of the cavities by anisotropic alkaline etching, thereafter, first layer coating is removed by liquid etching.

EFFECT: high quality factor of a resonant signal and reproducibility of characteristics of small-sized atomic cells for quantum devices with simultaneous reduction of power consumption.

6 cl, 1 tbl, 8 dwg