FIELD: semiconductor technology.
SUBSTANCE: invention can be used for preliminary fusion of multicomponent materials containing semiconductors and/or metals. The device includes body 1 with cover 2, a thermal unit and crucible 7 with an outer diameter of D and a working cavity with a height of H. The thermal unit has a height of 1.5H-1.7H, an internal diameter of 1.1D-1.2D and an external diameter of 1 ,6D-1.8D, consists of upper 3 and lower 4 rings, the height of which is 0.2-0.4H, and the internal and external diameters are equal to the corresponding diameters of the thermal unit; rods 5 made of high-temperature dielectric material and wire resistive heater 6. Rods 5, having a height of 1.1H-1.3 H and a diameter of 0.1D-0.2D, are fixed between rings 3 and 4, on which wire resistive heater 6 is wound parallel to rods 5, the distance between the turns of which is from 0.01D up to 0.02D. The thermal unit and crucible 7 are fixed on base 9, installed on stand 10.
EFFECT: uniform distribution of components in the volume of the synthesized material.
1 cl, 1 dwg
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Authors
Dates
2024-07-31—Published
2023-04-18—Filed