METHOD OF MAKING CONDUCTIVE COATING ON SURFACE OF PROBE FOR ATOMIC FORCE MICROSCOPY Russian patent published in 2024 - IPC G01Q70/16 

Abstract RU 2825297 C1

FIELD: scanning probe microscopy.

SUBSTANCE: invention relates to methods of making a conducting coating on the surface of an atomic force microscope for use in electroconductive techniques. Method is realized by depositing nanometer layers of zinc oxide and aluminum oxide in different ratios on the surface of a non-conducting probe, which enables to vary the electrical conductivity of the obtained layer.

EFFECT: obtaining a probe with a conductive coating for an atomic force microscope with the required value of electrical conductivity without changing the radius of the tip.

3 cl, 1 dwg

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RU 2 825 297 C1

Authors

Kozodaev Dmitrij Aleksandrovich

Yakovleva Anastasiya Aleksandrovna

Bobkov Anton Alekseevich

Ryabko Andrej Andreevich

Moshnikov Vyacheslav Alekseevich

Korepanov Oleg Alekseevich

Dates

2024-08-23Published

2023-11-13Filed