METHOD OF DETERMINING THICKNESS OF THIN DIELECTRIC FILM OF NANOMETER THICKNESS DEPOSITED ON METAL SUBSTRATE Russian patent published in 2024 - IPC G01B7/06 B82Y35/00 

FIELD: physics.

SUBSTANCE: invention relates to means of measuring thickness of a dielectric film, including a polymer film of nanometre thickness, deposited on a metal surface of arbitrary shape. Essence of the invention consists in the fact that the thin film thickness measurement method is realized by using the electric capacitive two-electrode method, in which one of the electrodes is liquid metal, consisting of metal in liquid state and made of low-toxic low-active low-melting metals or alloys, for example, gallium or Russian alloy. Second component of the method is the use of the design and materials of the measuring cell, which provide the conditions necessary for measuring electrical impedance in the measured region and simultaneously ensuring tightness of the contact. Invention includes an electrophysical model of the film and a method of processing measurement results, which enables to calculate the thickness of the coating using the formulas described in the present invention.

EFFECT: possibility of measuring thickness of a dielectric film of nanometre size on a plane or surface of an arbitrary shape in laboratory or industrial conditions.

6 cl, 4 dwg