FIELD: instrumentation.
SUBSTANCE: invention relates to instrument making and can be used in making ceramic-metal substrates used in ceramic printed-circuit boards, particularly in power electronics products, in gyroscopic devices, for example, in a compensation-type accelerometer. Ceramic plate has a copper coating and a tin protective layer on its front side. At the first stage, on the reverse side of the ceramic plate there are laser-cut grooves with depth of 0.7-0.9 of its thickness, which define the boundaries of the produced substrates. Copper coating and tin protector layer are applied on front side of ceramic plate at the end of the first stage of cutting. Then, contact pads are configured in the zones defined by said grooves, and the second stage of laser cutting is carried out from the front side of the plate with provision of shaping and separation of substrates from the plate.
EFFECT: method provides high quality of metal-ceramic substrates, reduced rejects at the stage of laser cutting and improved conditions for obtaining soldered connections of contact pads with functional elements.
1 cl, 2 dwg
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Authors
Dates
2025-01-28—Published
2024-07-08—Filed