METHOD OF MANUFACTURING TARGET FOR SPRAYING CHALCOGENIDE GLASSY MATERIALS IN VACUUM Russian patent published in 1994 - IPC

FIELD: applying coatings in vacuum. SUBSTANCE: method involves the steps of: applying suspension of oxide glassy material with dispersity of powder particles of 150. . . 200 μm and softening temperature of T_g1 equal to 640C onto a conductive base through a mask, fusing the target at temperature of 740C for 30 min after drying it, removing the mask from the cooled target and filling voids with suspension of chalcogenide glassy material of formula GeS₂ having softening temperature T_g2 equal to 492C. The method is characterized in that fusion is carried out as well after drying the suspension at temperature greater by 80. . . 100C than the powder softening temperature for 30. . . 40 min, total firing being carried out at temperature lower than softening temperature T_g2 by 10. . . 15C that is at temperature of approximately 482C for 3 hours. EFFECT: widened process capabilities.