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1 552 688

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A1

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IPC

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Application

4380130/21, 1987-12-21

(22)

Actual filing date

1987-12-21

(45)

Published

1996-01-20

(72)

Inventor

Abramov I.S.Bystrov Ju.A.Vil'Dgrube V.G.Kuznetsov V.G.Lisenkov A.A.

METHOD OF APPLICATION OF COATINGS IN VACUUM Russian patent published in 1996 - IPC

Abstract SU 1552688 A1

FIELD: electronic industry. SUBSTANCE: strength of counter magnetic field is changed in the process of deposition of plasma current, which ensures scanning of the flow of changed particles up to the surface of the substrate holder; the strength value of magnetic field varies, depending on the dimensions of the substrate holder and its position relative to the magnetic systems used. EFFECT: enhanced quality of coatings due to the improvement of uniformity in thickness. 6 dwg

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SU 1 552 688 A1

Authors

Abramov I.S.

Bystrov Ju.A.

Vil'Dgrube V.G.

Kuznetsov V.G.

Lisenkov A.A.

Dates

1996-01-20—Published

1987-12-21—Filed

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