FIELD: microelectronics. SUBSTANCE: when windows are opened for access to contact plates and areas for plate separation, window sizes conform to condition of overlapping of lower passive layer of phosphor-silicate glass by upper passive layer of silicon nitride by 0.2-5 mcm. EFFECT: increased functional capabilities. 2 cl, 1 dwg, 2 tbl
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0 |
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Authors
Dates
1996-10-10—Published
1991-01-22—Filed