FIELD: electronics. SUBSTANCE: titanium in the capacity of getter is applied with rate 10-20 /s to samarium monosulfide at points of arrangement of termination pads for 50-100 s. Nickel is applied as second layer in the course of 300-400 s with rate 10-20 /s. Formation of such two-layer film is performed at temperature 100-200 C. EFFECT: high stability of operational characteristics, prolonged service life of termination pads. 1 dwg, 7 tbl
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Authors
Dates
1995-05-10—Published
1991-06-20—Filed