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2 114 931

(13)

(51)

IPC

(21) (22)

Application

97112295/02, 1997-07-10

(22)

Actual filing date

1997-07-10

(45)

Published

1998-07-10

(72)

Inventor

Vasilenko Nikolaj Vasil'EvichIvashov Evgenij NikolaevichPrusakov Evgenij ViktorovichStepanchikov Sergej Valentinovich

(73)

Holder

Vasilenko Nikolaj Vasil'Evich

THIN FILM APPLYING APPARATUS Russian patent published in 1998 - IPC

Abstract RU 2114931 C1

FIELD: microelectronics. SUBSTANCE: apparatus has flat evaporator and receptacle dome with substrate holders and substrates secured on substrate holders. Receptacle dome is made curved, with curvature being exponential cosine curve with degree factor of 1/2. EFFECT: increased efficiency and provision for improved uniform thin layer sprayed on substrate. 1 dwg

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RU 2 114 931 C1

Authors

Vasilenko Nikolaj Vasil'Evich

Ivashov Evgenij Nikolaevich

Prusakov Evgenij Viktorovich

Stepanchikov Sergej Valentinovich

Dates

1998-07-10—Published

1997-07-10—Filed