APPARATUS FOR MOVING SUBSTRATE HOLDER Russian patent published in 1998 - IPC

FIELD: thin film deposition in vacuum. SUBSTANCE: substrate holder is mounted on elastic member such as bellows rigidly connected with stationary base with possibility of rotation relative to horizontal coordinate axes. Two driving tie rods are jointly mounted in vertical direction between substrate holder and stationary base. Apparatus also includes second substrate holder mounted on first one with possibility of axial rotation and connected with rotation motion drive by means of elastic bellows fluid tightly joined with rotation motion drive and second substrate holder. EFFECT: improved design. 1 dwg, 1 expc