Show metadata Hide metadata

(19)

(11)

2 008 741

(13)

(51)

IPC

(21) (22)

Application

5049548/25, 1992-06-24

(22)

Actual filing date

1992-06-24

(45)

Published

1994-02-28

(72)

Inventor

Klykov V.I.Vavers V.Ja.Gavrilkina E.F.Stasjuk I.O.

(73)

Holder

Klykov Viktor IvanovichVavers Vija JanovnaGavrilkina Enafa FeoktistovnaStasjuk Igor' Olegovich

REACTOR FOR PLASMA PRECIPITATION Russian patent published in 1994 - IPC

Abstract RU 2008741 C1

FIELD: plasma technology. SUBSTANCE: reactor for plasma precipitation has body in the form of tube. One end of it carries branch pipe for reactor pumping out, the other end has sealing cover. HF electrodes are positioned outside body. Shielding element in the form of disc made of precipitated material is placed inside body in front of branch pipe. EFFECT: enhanced operational efficiency. 1 dwg, 2 tbl

Similar patents RU2008741C1

Title	Year	Author	Number
PROCESS OF PLASMA ETCHING OF CONTACT WINDOWS IN INSULATING AND PASSIVATING LAYERS OF DIELECTRIC BASED ON SILICON	1992	Bliznetsov V.N. Gushchin O.P. Krasnikov G.Ja. Trusov A.A. Khrapova V.V. Jachmenev V.V.	RU2024991C1
METHOD OF REMOVING ORGANIC RESIDUE FROM PIEZOELECTRIC SUBSTRATES	2008	Nersesov Sergej Surenovich Golubskij Aleksandr Alekseevich Gornev Evgenij Sergeevich Trusov Anatolij Arkad'Evich	RU2406785C2
FLUOROPLASTIC SUBSTRATE METALLIZATION DEPOSITION METHOD	1991	Zakharov V.R. Rostova G.S. Dodonov V.А. Тitov V.А.	RU2020777C1
PROCESS OF PLASMA-CHEMICAL PRECIPITATION OF FILMS OF PHOSPHOROUS-SODA-LIME GLASS	1991	Turtsevich A.S. Krasnitskij V.Ja. Kozlov A.L. Khimko G.A. Koreshkov G.A. Kastritskij L.V.	SU1795829A1
SEMICONDUCTOR DEVICE MANUFACTURING PROCESS	1990	Samsonenko B.N. Sorokin I.N. Dzhalilov Z. Pautov A.P.	SU1823715A1
PROCESS PLANATION OF INTEGRATED CIRCUITS	1992	Bliznetsov V.N. Gushchin O.P. Zheleznov F.K. Trusov A.A. Jachmenev V.V.	RU2024992C1
METHOD OF PRODUCING SILICON NITRIDE FILM	0	Turtsevich Arkadij Stepanovich Krasnitskij Vasilij Yakovlevich Petrashkevich Valerij Frantsevich Khimko Georgij Antonovich Koreshkov Gennadij Anatolevich Sarychev Oleg Ernestovich	SU1718302A1
PLANT FOR DEPOSITION OF THIN DIELECTRIC FILMS	1992	Rubtsov N.M. Nagornyj S.S.	RU2062526C1
METHOD OF SILICON NITRIDE PRECIPITATION ON SILICON SUBSTRATE	2012	Anurov Aleksej Evgen'Evich Zhukov Andrej Aleksandrovich Dolgopolov Vladimir Mironovich	RU2518283C1
FIELD EMISSION MICROTRIODE AND METHOD OF MANUFACTURE	2006	Tatarenko Nikolaj Ivanovich	RU2360321C2

RU 2 008 741 C1

Authors

Klykov V.I.

Vavers V.Ja.

Gavrilkina E.F.

Stasjuk I.O.

Dates

1994-02-28—Published

1992-06-24—Filed