METHOD OF CHECK OF SPECIFIC SURFACE RESISTANCE OF THIN RESISTIVE FILMS IN PROCESS OF PRECIPITATION Russian patent published in 1995 - IPC

FIELD: electronics. SUBSTANCE: basic and additional tested samples are positioned simultaneously with working substrates into zone of precipitation of resistive films, precipitation of resistive material on surfaces of tested samples and working substrates is conducted. Ohmmeter is connected to additional tested sample before precipitation of resistive material and connection of ohmmeter to basic tested sample is performed at moment when thickness of resistive film on additional tested sample reaches value corresponding to resistance R₁ ohm selected from relationship R₁= (1,2-1,4)R= (1.2- 1.4)R, where R is specified value of resistance of basic tested sample corresponding to value of specific surface resistance in ohm. Precipitation of resistive material is stopped at moment when specified value of resistance is reached on basic tested sample. EFFECT: facilitated manufacturing process. 1 tbl