MONOCRYSTALLINE SILICON OBTAINING METHOD Russian patent published in 1996 - IPC

Abstract RU 2057211 C1

FIELD: production of semiconductor materials. SUBSTANCE: method involves melting basic silicon in crucible; introducing seed; drawing crystal from melt onto rotating seed. The process is conducted in argon atmosphere, with argon consumption , upon introduction of seed, being determined by formula recited in Specification. EFFECT: increased efficiency, simplified method and improved quality of product. 2 cl, 1 tbl 1

Similar patents RU2057211C1

Title Year Author Number
METHOD OF PRODUCTION OF THE SINGLE-CRYSTAL SILICON (VERSIONS) 2005
  • Remizov Oleg Alekseevich
RU2278912C1
METHOD OF PRODUCTION OF MONOCRYSTALLINE SILICON 1999
  • Remizov O.A.
  • Dzhej Jun Kvon
RU2193079C1
METHOD OF GROWING SILICON MONOCRYSTALS 1995
  • Sal'Nik Z.A.
  • Mikljaev Ju.A.
RU2076909C1
SILICON MONOCRYSTAL PRODUCTION METHOD 1992
  • Sal'Nik Z.A.
  • Mikljaev Ju.A.
RU2042749C1
METHOD FOR GROWING SILICON SINGLE CRYSTALS 1995
  • Sal'Nik Z.A.
  • Mikljaev Ju.A.
RU2077615C1
METHOD OF PREPARING SILICON MONOCRYSTALS INVOLVING MONOCRYSTAL GROWTH DISRUPTION 2000
  • Beringov Sergej Borisovich
  • Ushankin Jurij Vladimirovich
  • Shul'Ga Jurij Grigor'Evich
RU2189407C2
SILICON MONOCRYSTAL GROWING APPARATUS, SCREENING DEVICE AND CRYSTAL GROWING PROCESS BY CHOKHRALSKY METHOD 2002
  • Beringov Sergej Borisovich
  • Kulikovskij Ehduard Vladimirovich
  • Povstjanyj Vladimir Grigor'Evich
  • Shul'Ga Jurij Grigor'Evich
RU2231582C1
METHOD OF GROWING MONOCRYSTALS FROM MELT 2000
  • Beringov Sergej Borisovich
  • Rudenko Sergej Vasil'Evich
  • Shul'Ga Jurij Grigor'Evich
RU2200775C2
DEVICE FOR SILICON SINGLE CRYSTALS GROWING BY CHOKHRALSKY METHOD 2007
  • Prostomolotov Anatolij Ivanovich
  • Verezub Natalija Anatol'Evna
  • Zhvirbljanskij Vilen Jul'Evich
  • Mil'Vidskij Mikhail Grigor'Evich
RU2355834C1
DEVICE FOR GROWING OF SINGLE CRYSTALS OF SILICON BY CZOCHRALSKI METHOD 2008
  • Prostomolotov Anatolij Ivanovich
  • Verezub Natalija Anatol'Evna
  • Zhvirbljanskij Vilen Jul'Evich
  • Mil'Vidskij Mikhail Grigor'Evich
RU2382121C1

RU 2 057 211 C1

Authors

Remizov O.A.

Karavaev N.M.

Dates

1996-03-27Published

1995-01-17Filed