HYBRID INTEGRATED CIRCUIT OF GAS SENSOR Russian patent published in 1999 - IPC

FIELD: electronics, miniature measurement converters of gas concentration. SUBSTANCE: hybrid integrated circuit of gas sensor has substrate in the form of ring for peripheral part and in the form of disc for central part connected by means of three straps arranged at angle of 120 deg and having branchings near peripheral part placed at angle of 120 deg. Central part carries gas-sensitive film, film heater and film electrode to measure resistance of gas-sensitive film. Heater and electrode are electrically connected along straps to termination pads located on peripheral part. Thickness of straps and central part is 0.15-0.25 mm and strap width is 0.05-0.15 mm. EFFECT: enhanced selectivity and adaptability to manufacture of proposed gas sensor. 2 cl, 5 dwg