FIELD: microelectronics. SUBSTANCE: anode electrochemical treatment of unprotected sections of low-resistance silicon plates is performed in 48% aqueous solution of hydrofluoric acid with current density 10-60 mA/sq.cm for course of 10-60 min to increase specific resistance of i-region under room temperature. EFFECT: increased specific resistance of i-region under room temperature.
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD OF MANUFACTURE OF LOW-IMPEDANCE CONTACT TO SILICON | 1993 |
|
RU2065226C1 |
| HIGH-POWER SEMICONDUCTOR RESISTOR AND ITS MANUFACTURING PROCESS | 2000 |
|
RU2169411C1 |
| METHOD OF MANUFACTURE OF SEMICONDUCTOR STRUCTURE CONTAINING A P-N JUNCTION UNDER POROUS SILICON FILM FOR IMPLEMENTATION OF A PHOTOELECTRIC CONVERTER | 2017 |
|
RU2662254C1 |
| METHOD FOR FORMING A LAYER OF GOLD ELECTROCHEMICALLY DEPOSITED FROM ELECTROLYTES WITH pH = 6-7 ON THE SURFACE OF SILICON SEMICONDUCTOR STRUCTURES | 2021 |
|
RU2778998C1 |
| METHOD FOR PRODUCING SEMICONDUCTOR-ON-POROUS- SILICON STRUCTURE | 1997 |
|
RU2123218C1 |
| METHOD OF PRODUCING POROUS SILICON PRODUCTION | 2017 |
|
RU2652259C1 |
| METHOD OF PRODUCING NANOPOWDERS OF POROUS SILICON | 2019 |
|
RU2722098C1 |
| METHOD OF CONTROLLING OPERATION OF A METAL-INSULATOR-SEMICONDUCTOR MEMBRANE CAPACITOR STRUCTURE | 2018 |
|
RU2706197C1 |
| METHOD FOR PREPARING WATER SUSPENSION OF BIOCOMPATIBLE POROUS SILICON PARTICLE | 2012 |
|
RU2504403C1 |
| METHOD OF OBTAINING POWDER OF POROUS SILICON | 2014 |
|
RU2572128C1 |
