FIELD: manufacture of thin-filmed converters of beam charge compound used in tandem accelerators and atomic probes. SUBSTANCE: carbon in the form of neutral atoms accelerated up to high energies within 20 to 100 eV in the presence of inert gas at low partial pressure is deposited on the glass substrate coated with a surface-active agent cooled down to the temperature of liquid nitrogen, then the substrate is removed, and the obtained free film is transferred to the target holder. Krypton or argon can be used as inert gas. EFFECT: enhanced mechanical strength of the target, reduced energy threshold of particles transmission, enhance service life of the target under beam. 3 cl
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Authors
Dates
1996-11-20—Published
1993-10-19—Filed