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Application

93033094/25, 1993-04-26

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Actual filing date

1993-04-26

(45)

Published

1997-03-27

(72)

Inventor

Vologirov A.G.Grigor'Ev I.Ju.Ivashov E.N.Kondrashov P.E.Orinchev S.M.Sleptsov V.V.Stepanchikov S.V.

(73)

Holder

Moskovskij Gosudarstvennyj Institut Ehlektroniki I Matematiki Universitet)

METHOD FOR VACUUM COOLING OF SEMICONDUCTOR PLATES Russian patent published in 1997 - IPC

Abstract RU 2076390 C1

FIELD: vacuum treatment of semiconductor plates. SUBSTANCE: heat-conducting material used for the purpose is low-melting metal gallium placed in liquid state in pan without additional fixation and then heat-conducting rubber spacer is inserted between plates and pan. EFFECT: facilitated procedure. 2 dwg

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RU 2 076 390 C1

Authors

Vologirov A.G.

Grigor'Ev I.Ju.

Ivashov E.N.

Kondrashov P.E.

Orinchev S.M.

Sleptsov V.V.

Stepanchikov S.V.

Dates

1997-03-27—Published

1993-04-26—Filed

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