COOLING SYSTEM OF SUBSTRATES IN VACUUM Russian patent published in 1997 - IPC

Abstract RU 2089662 C1

FIELD: cooling systems of substrates in vacuum. SUBSTANCE: the offered cooling system has substrate, holder, mechanical hold-down devices and heat-conducting substance. Located in volume of heat-conducting substance is tubular cooling jacket. Cooling is effected by supply of cooling substance from jacket to substrate by means of heat-conducting substance. EFFECT: higher efficiency. 2 dwg

Similar patents RU2089662C1

Title	Year	Author	Number
DEVICE FOR COOLING OF SUBSTRATES IN VACUUM	1993	Vologirov A.G. Ivashov E.N. Kondrashov P.E. Orinchev S.M. Sleptsov V.V. Stepanchikov S.V.	RU2089654C1
CATHODE UNIT	1993	Ivashov E.N. Kondrashov P.E. Orinchev S.M. Sleptsov V.V. Stepanchikov S.V.	RU2089661C1
METHOD FOR VACUUM COOLING OF SEMICONDUCTOR PLATES	1993	Vologirov A.G. Grigor'Ev I.Ju. Ivashov E.N. Kondrashov P.E. Orinchev S.M. Sleptsov V.V. Stepanchikov S.V.	RU2076390C1
METHOD OF ADMITTING GAS INTO VACUUM CHAMBER	1993	Vologirov A.G. Ivashov E.N. Kondrashov P.E. Orinchev S.M. Sleptsov V.V. Stepanchikov S.V.	RU2073745C1
DEVICE MEASURING DIELECTRIC PARAMETERS OF MEDIUM	1994	Gvozdev V.I. Iovdal'Skij V.A. Linev A.A. Podkovyrin S.I.	RU2109274C1
APPARATUS FOR COOLING SUBSTRATES IN VACUUM	1993	Ivashov Evgenij Nikolaevich Kondrashov Pavel Evgen'Evich Orinchev Sergej Mikhajlovich Stepanchikov Sergej Valentinovich	RU2046838C1
VACUUM MATERIAL APPLICATION DEVICE	2011	Galanikhin Aleksandr Vasil'Evich	RU2471883C1
METHOD OF FRICTION REDUCTION IN VACUUM	1999	Ivashov E.N. Travkin V.V.	RU2153621C1
DESIGN OF CATHODE UNIT FOR APPLICATION OF FILMS IN VACUUM	1993	Ivashov E.N. Kondrashov P.E. Orinchev S.M. Sleptsov V.V. Stepanchikov S.V.	RU2089659C1
VACUUM DEPOSITION APPARATUS	1992	Ivashov E.N. Kondrashov P.E. Sleptsov V.V. Stepanchikov S.V.	RU2073744C1

RU 2 089 662 C1

Authors

Vologirov A.G.

Ivashov E.N.

Orinchev S.M.

Sleptsov V.V.

Stepanchikov S.V.

Dates

1997-09-10—Published

1993-11-29—Filed