COOLING SYSTEM OF SUBSTRATES IN VACUUM Russian patent published in 1997 - IPC

Abstract RU 2089662 C1

FIELD: cooling systems of substrates in vacuum. SUBSTANCE: the offered cooling system has substrate, holder, mechanical hold-down devices and heat-conducting substance. Located in volume of heat-conducting substance is tubular cooling jacket. Cooling is effected by supply of cooling substance from jacket to substrate by means of heat-conducting substance. EFFECT: higher efficiency. 2 dwg

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RU 2 089 662 C1

Authors

Vologirov A.G.

Ivashov E.N.

Orinchev S.M.

Sleptsov V.V.

Stepanchikov S.V.

Dates

1997-09-10—Published

1993-11-29—Filed