SILICON TETRAFLUORIDE SYNTHESIS METHOD Russian patent published in 2010 - IPC C01B33/107 

FIELD: chemistry.

SUBSTANCE: invention can be used in making in electronic industry during production of solar cells. Sodium silicofluoride is pre-dried at temperature of up to 300°C and residual pressure of up to 2 mm Hg. At the first thermal decomposition step, sodium silicofluoride is heated to 620-650°C with constant removal of the released silicon tetrafluoride at residual pressure of up to 30 mm Hg. At the second step the remaining mass is heated to temperature not lower than 750°C, while also constantly removing silicon tetrafluoride at pressure not higher than 30 mm Hg.

EFFECT: invention enables to avoid agglomeration and melting of the reaction mass and obtain pure silicon tetrafluoride with output of over 99%.

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