METHOD FOR FILM COATING Russian patent published in 2008 - IPC C23C14/35 C23C14/48 B82B3/00 

FIELD: metallurgy, coating.

SUBSTANCE: method includes actuation gas feed into evacuated vessel, pulsed lasing of plasma stream and high-energy ion beam and its alternate action to support in distance. Discrete plasma stream is created by means of firing of high-current high-voltage diffusive discharge which is formed by means of passing through stationary plasma of magnetron discharge of current pulse duration 10^-6...1 s, density 0.3-100 A/sm² and repetition rate till 10³ Hz. Specified distance is chosen more than time of plasma recombination of high-current high-voltage diffusive discharge in volume of evacuated capsule. Effect to support by pulsed beam of high-energy ions is implemented with energy which is not more than 10⁶ eV and with repetition rate till 10³ Hz. At that it is implemented rejection of high-voltage fault of accelerating gaps from secondary electrons of actuation gas and plasma electrons.

EFFECT: providing of high velocity of coating, ability to effect on coating features and increased adherence of coating to support.

6 cl, 3 dwg, 2 ex