FIELD: metallurgy, coating.
SUBSTANCE: method includes actuation gas feed into evacuated vessel, pulsed lasing of plasma stream and high-energy ion beam and its alternate action to support in distance. Discrete plasma stream is created by means of firing of high-current high-voltage diffusive discharge which is formed by means of passing through stationary plasma of magnetron discharge of current pulse duration 10-6...1 s, density 0.3-100 A/sm2 and repetition rate till 103 Hz. Specified distance is chosen more than time of plasma recombination of high-current high-voltage diffusive discharge in volume of evacuated capsule. Effect to support by pulsed beam of high-energy ions is implemented with energy which is not more than 106 eV and with repetition rate till 103 Hz. At that it is implemented rejection of high-voltage fault of accelerating gaps from secondary electrons of actuation gas and plasma electrons.
EFFECT: providing of high velocity of coating, ability to effect on coating features and increased adherence of coating to support.
6 cl, 3 dwg, 2 ex
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Authors
Dates
2008-11-27—Published
2007-02-12—Filed