METHOD TESTING PARAMETERS OF FILM COAT IN PROCESS OF CHANGE OF FILM THICKNESS ON BACKING AND DEVICE FOR ITS IMPLEMENTATION Russian patent published in 1997 - IPC

FIELD: measurement technology. SUBSTANCE: device for implementation of method incorporates installation for application if film, radiation source, collimation system and detector. Method is realized by irradiation of sample with X-ray radiation with wave length λ at sliding angle of q_o chosen on basic of inequalities sinθ_c > d_2μ(λ) (1), sinθ_o < 1/2 sinθ_c•(I_o•τ)^1/4ξ^1/2. (II), sinθ_o > λ/4d₁ (III), where θ_c is Brewster angle, constant for given material and given wave length of X-ray radiation; μ(λ) is linear coefficient of photoelectric absorption of coat material constant for given material on certain wave length λ; I_o is intensity of beam of X-ray radiation incident on to backing (this value is known); d₁ is minimal thickness of analyzed coat; d₂ is maximal thickness to which analysis is conducted; ξ is preset relative error of intensity measurement; t is time of one measurement and simultaneous registration of reflected signal by number of which oscillations thickness of coat is found. System 7 determines microroughness and density of coat by contrast range K and average value M. EFFECT: widened range of analyzed thicknesses of coats, possibility of determination of density of growing coat thanks to selection of wave length of probing radiation and radiation incidence angle. 5 cl, 5 dwg